申请人 |
LAM RESEARCH CORPORATION;AUGUSTINO, JASON;DE LA LLERA, ANTHONY;RONNE, ALLAN K.;KIM, JAEHYUN;DHINDSA, RAJINDER;WANG, YEN-KUN;ULLAL, SAURABH J.;NORELL, ANTHONY J.;COMENDANT, KEITH;DENTY, WILLIAM M., JR. |
发明人 |
AUGUSTINO, JASON;DE LA LLERA, ANTHONY;RONNE, ALLAN K.;KIM, JAEHYUN;DHINDSA, RAJINDER;WANG, YEN-KUN;ULLAL, SAURABH J.;NORELL, ANTHONY J.;COMENDANT, KEITH;DENTY, WILLIAM M., JR. |