| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning apparatus for relaxing the assembly precision of a stage, extending the lifetime of a guide section, and securing a simple degree of drive freedom, to provide an aligner using the positioning apparatus, and to provide a device manufacturing method using the aligner. <P>SOLUTION: The positioning apparatus comprises: a coarse movement stage 4 traveling on a stage running surface 3 with a large stroke; a slight movement stage 7 traveling to the coarse movement stage 4 with a small stroke; and an X guide 6 for guiding so that the coarse movement stage 4 travels along the stage running surface 3. The positioning apparatus comprises a locking apparatus 10 that has a rotary shaft 14 supported rotatably by an X guide 6, gives binding force to the rotary shaft 14 so that the coarse movement stage 4 does not rotate with pressure for sandwiching the rotary shaft 14, and enables the coarse movement stage 4 to rotate by releasing the pressure for sandwiching the rotary shaft 14. <P>COPYRIGHT: (C)2008,JPO&INPIT |
