发明名称 METHOD FOR PATTERNING METAL USING NANOPARTICLE CONTAINING PRECURSOR
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a process for manufacturing a metal pattern of a nanometer scale to a one-dimensional or two-dimensional pattern by a single low-temperature process. <P>SOLUTION: Continuous, conducting metal patterns can be formed by laser-drawing patterns on a film formed from metal nanoparticles, metal salt and polymer matrix. The metal patterns can be one, two, or three dimensional and have high resolution resulting in feature sizes in the order of micron down to nanometers. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008147168(A) 申请公布日期 2008.06.26
申请号 JP20070270125 申请日期 2007.10.17
申请人 ARIZONA BOARD OF REGENTS 发明人 PERRY JOSEPH W;MARDER SETH R;STELLACCI FRANCESCO
分类号 B82B3/00;H01B13/00;B22F1/00;B82B1/00;C01B35/06;C23C18/14;H01B1/02;H01B1/22;H01L21/768;H05K1/09;H05K3/10 主分类号 B82B3/00
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