| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable to automatically carry out correction even when there is a large defect when correcting the defect of a substrate. <P>SOLUTION: A defect correcting device 1 has an objective lens 3 for repair used when laser light is irradiated on the defect, and the objective lens 4 for observation of lower magnification than that of the objective lens 3 for the repair. When extracting the defect and position of the defect, such extractions are carried out under a wide field of view of the objective lens 4 for observation and the position to be corrected is automatically set under this field of view. When carrying out the correction, after switched to the objective lens 3 for the repair and movement is made so that the light axis n and the position to be corrected are coincided with each other, the laser light is irradiated. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
