| 摘要 |
<p>The present invention relates to an atmospheric pressure plasma generating apparatus by an induction electrode. In particular, one or more upper metal electrodes are disposed on the upper side and an induction electrode and an induction electrode antenna are disposed opposite to the upper electrodes, so that a high-density plasma is generated at low applied voltage. Further, base electrodes are used to preclude interference between the upper electrodes. Thus, lots of the upper electrodes can be constructed at a narrow space, the uniformity of intensity of a generated plasma can be secured, the source of a plasma can be provided by the upper electrodes, and the intensity of a plasma can be increased. In addition, a lower electrode is disposed on the lower side in order to extend the length of a generated plasma. Accordingly, 3D samples can be processed conveniently, and samples of a large area and a 3D structure can be cleaned and surface reformed effectively.</p> |
