| 摘要 |
An anisotropic conductive connector by which a good electrical connection state is achieved surely even if the pitch of electrodes under inspection is extremely small and a good electrical connection state is sustained stably even under high temperature environment; and inspection equipment of a circuit device provided with this. In the anisotropic conductive connector, a plurality of conductive path forming portions extending in the thickness direction have elastic, anisotropic conductive films insulated from each other by an insulating portion, and a sheet-like connector consisting of an insulating sheet provided with a plurality of through holes extending in the thickness direction and a plurality of electrode structures arranged, respectively, in the through holes of the insulating sheet to project from the opposite surfaces thereof. Each electrode structure is located on each conductive path forming portion, the insulating sheet is secured integrally to the insulating portion, and each electrode structure has electrode portions having a diameter larger than that of the through hole and formed at the opposite ends of a body section inserted into the through holes of the insulating sheet such that they can be moved relatively to the insulating sheet in the thickness direction thereof.
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