发明名称 Method for polishing a memory or rigid disk with an amino acid-containing composition
摘要 A method of planarizing or polishing the surface of a memory or rigid disk comprising abrading at least a portion of the surface with (i) a polishing composition comprising an oxidizing agent selected from the group consisting of persulfates and peroxides, an amino acid, and water, and (ii) an abrasive.
申请公布号 AU2001251249(A8) 申请公布日期 2008.06.26
申请号 AU20010251249 申请日期 2001.04.03
申请人 CABOT MICROELECTRONICS CORPORATION 发明人 SHUMIN WANG;MINGMING FANG
分类号 B24B37/00;C09G1/02;C09K3/14 主分类号 B24B37/00
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