发明名称 |
Method for polishing a memory or rigid disk with an amino acid-containing composition |
摘要 |
A method of planarizing or polishing the surface of a memory or rigid disk comprising abrading at least a portion of the surface with (i) a polishing composition comprising an oxidizing agent selected from the group consisting of persulfates and peroxides, an amino acid, and water, and (ii) an abrasive. |
申请公布号 |
AU2001251249(A8) |
申请公布日期 |
2008.06.26 |
申请号 |
AU20010251249 |
申请日期 |
2001.04.03 |
申请人 |
CABOT MICROELECTRONICS CORPORATION |
发明人 |
SHUMIN WANG;MINGMING FANG |
分类号 |
B24B37/00;C09G1/02;C09K3/14 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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