| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element wherein the reduction of displacement and the degradation of leakage property are prevented for excellent displacement property, and to provide a method of manufacturing a liquid jetting head, and further, to provide the piezoelectric element. <P>SOLUTION: In the method of manufacturing a piezoelectric element 300 comprising a lower electrode 60, a piezoelectric-substance layer 70, and an upper electrode 80, when forming the upper electrode 80, a first upper electrode 81 made of a conductive oxide metal is formed by a sol-gel method or an MOD method on the side of the piezoelectric-substance layer 70, and a second upper electrode 82 is formed by a PVD method on the first upper electrode 81. <P>COPYRIGHT: (C)2008,JPO&INPIT |
