| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an actuator device in which a piezoelectric element has improved durability and reliability, and a liquid jetting head equipped with the actuator formed by this manufacturing method. <P>SOLUTION: As shown in Fig. 2, the actuator device is provided with a diaphragm including a silicon oxide film provided on one surface side of a silicon substrate and a zirconium oxide layer provided thereon, and a piezoelectric element 300 consisting of a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 via this diaphragm. The manufacturing method of the actuator device has a processing step of executing surface removing processing for removing the surface of the silicon oxide film by 30 nm-100 nm thickness, and an oxidizing step of providing a zirconium layer on the processed silicon oxide film and thermally oxidizing the zirconium layer to form a zirconium oxide layer. <P>COPYRIGHT: (C)2008,JPO&INPIT |
