| 摘要 |
PROBLEM TO BE SOLVED: To provide machining equipment wherein its liquid-proof structure for its cutting liquid is simplified without interfering its cutting operations, and its liquid-proof effect can be improved. SOLUTION: In the machining equipment, a chucking table 20 for holding a machined object 10 is so provided as to fix its position in the XY plane. On the other hand, cutting means 30a, 30b are subjected to machining feed in the X-axis direction by a machining feed means 50, and they are subjected to depth-setting feed in the Z-axis direction by depth-setting feed means 70a, 70b. Thereby, the machining equipment is so constituted as to perform the cutting machining of the machined object 10 held on the chucking table 20. Hereupon, as the liquid proof for the cutting liquid of the machining equipment, it is not necessary to provide any liquid-proof means of bellows structure horizontally around the chucking table 20. For example, on the upper side of the chucking table 20, the liquid-proof means having movable simple structure are so provided satisfactorily that they follow the feed operations of the machining means 50, dividing feed means 60a, 60b, and the depth-setting feed means 70a, 70b. COPYRIGHT: (C)2008,JPO&INPIT |
