| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection data creation method for creating inspection data that is suitable for inspecting a pattern formed by multiple exposures. SOLUTION: This inspection data creation method is used for an inspection method, wherein patterns in the same layer on a substrate formed by multiple exposure by using a plurality of photomasks are compared with the inspection data to inspect the patterns. The creation method includes a step S2, where in each piece of design data of the plurality of photomasks, corner treatment is carried out on the data corresponding to a corner part of the pattern, and a step S3, wherein based on the design data of the plurality of photo-masks subjected to the corner treatment. COPYRIGHT: (C)2008,JPO&INPIT |
