| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for carrying out a PCVD deposition process. SOLUTION: The apparatus in which one or more doped or undoped glass layers are coated onto the interior of a glass substrate tube, comprises an applicator having an inner wall and an outer wall and a microwave guide which opens into the applicator. The applicator extends around a cylindrical axis and which is provided with a passage adjacent to the inner wall, through which the microwaves supplied via the microwave guide can exit. Over the cylindrical axis the substrate tube can be positioned, and the applicator is fully surrounded by a furnace that extends over the cylindrical axis. COPYRIGHT: (C)2008,JPO&INPIT
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