| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control system of a machine tool for ultra-precision machining, which controls temperature of a heat medium liquid circulating in the machine tool with very high precision and suppresses occurrence of fluctuation of temperature over a long time. SOLUTION: This temperature control system of the machine tool has: a cooling means for cooling the heat medium liquid in a liquid receiving tank 31; a cooling liquid tank 32 for storing the cooled heat medium liquid; a cooling controlling means 20 for controlling temperature for cooling the heat medium liquid; an opened type damping tank 33 for reducing occurrence of fluctuation of temperature of the heat medium liquid; a heating means 10 for heating the heat medium liquid fed from the opened type damping tank; a liquid temperature uniformizing means 11 for uniformizing the distribution of liquid temperature of the heat medium liquid passing through the heating means; liquid temperature sensors 22, 23 for detecting temperature of the heat medium liquid after it is heated by the heating means; a heating controlling means 20 for controlling the heating means to maintain temperature of the heat medium liquid at the final target temperature; a sealed type damping means 12 for reducing occurrence of fluctuation of temperature of the heat medium liquid passing through the liquid temperature uniformizing means; and a circulation passage 2 for circulating the heat medium liquid maintained at the final target temperature into the machine tool and returning the heat medium liquid into the liquid receiving tank. COPYRIGHT: (C)2008,JPO&INPIT
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