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发明名称
摘要
申请公布号	JP2008522434(A)	申请公布日期	2008.06.26
申请号	JP20070544391	申请日期	2005.11.21
申请人		发明人
分类号	H01L21/683;H01L21/304	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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