SOLID-STATE IMAGING DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a solid-state imaging device suppressing a decrease in output sensitivity caused by the downsizing of a pixel size by suppressing an increase in noise.

SOLUTION: The solid-state imaging device related to this invention comprises a semiconductor substrate 101; a photoelectric converting unit 102 formed on the semiconductor susbtrate 101 and converting light to a signal charge; a first insulating film 115 formed over the photoelectric converting unit 102; and a second insulating film 116 formed on the first insulating film 115, consisting of a material having a refractive index different from that of a material for comprising the first insulating film 115, and having a microlens convex downward contacting with the first insualting film 115. The top of the microlens shape is a planar shape, and other than the top of the microlens shape is a curved surface shape.

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