STEAM GENERATOR, PROCESSING SYSTEM, STEAM GENERATION METHOD, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To stabilize an amount of steam generated by a steam generator and prevent the rise of temperature of a cover for a tank case. SOLUTION: The generator includes a storage space 61 which stores a liquid, a heater 62 which heats the liquid in the storage space 61, and a heat exchange portion 76 which raises the temperature of the liquid before the liquid is fed to the storage space 61 using the heat generated by a heater 62. The heat exchange portion 76 is disposed between a tank case 60 having the storage space 61 and the heater 61, and a cover 75 covering the outside of the tank case 60. The heat exchange passage is arranged in the heat exchange portion 76 surrounding the storage space 61 and the heater 62. COPYRIGHT: (C)2008,JPO&INPIT