发明名称 Phosphorus-Stabilized Transition Metal Oxide Diffusion Barrier
摘要 Method for controlling glass formation on a semiconductor substrate. By using a doped diffusion barrier material, such as a transition metal oxide paste, the subsequent diffusion of glass forming elements into the substrate may be stabilized and controlled.
申请公布号 US2008150084(A1) 申请公布日期 2008.06.26
申请号 US20070949679 申请日期 2007.12.03
申请人 ADVENT SOLAR, INC. 发明人 HACKE PETER;GONZALES VICTORIA;DOMINGUEZ JASON
分类号 H01L29/00;H01L21/22 主分类号 H01L29/00
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