发明名称 |
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SRAM CELL |
摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a current leakage may probably occur from an interconnection layer to a well region of a semiconductor substrate in a common contact formation portion due to the wear of a film of the side wall when forming an opening portion TH. <P>SOLUTION: An SRAM cell is provided with a first interconnection layer for connecting a gate electrode of a first transistor and a diffusion region of a second transistor in a first opening portion. In the first opening portion, the first interconnection layer is formed away from a principal plane of the semiconductor substrate whereon the first transistor and the second transistor are to be formed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008147340(A) |
申请公布日期 |
2008.06.26 |
申请号 |
JP20060331620 |
申请日期 |
2006.12.08 |
申请人 |
NEC ELECTRONICS CORP |
发明人 |
MINAGAWA SUMUTO |
分类号 |
H01L21/8244;H01L21/28;H01L21/768;H01L23/522;H01L27/11 |
主分类号 |
H01L21/8244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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