| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus for forming a carbon film which can improve current-voltage characteristics of a cold cathode when used for a material of the cold cathode. SOLUTION: This film-forming apparatus comprises: a vacuum film-forming chamber 6; and a tubular cathode 8 which is installed in the vacuum film-forming chamber 6, generates a direct-current plasma inside of the chamber, and makes a film formed on the surface of a substrate 10 (electroconductive wire) that is arranged inside of the chamber. The method for preventing overdischarge includes applying positive pulse voltage V2 periodically to the tubular cathode 8, in a process in which a gas is decomposed by the direct-current plasma to form the film. COPYRIGHT: (C)2008,JPO&INPIT |
