| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of ensuring both the moving range of a movable part where an observation part is attached and size reduction. SOLUTION: The measurement device 1 is constituted of a fixed part 10, the movable part 20 provided linearly movable with respect to the fixed part 10, a support part 15 attached to the fixed part 10 for supporting an object S to be measured, the observation part 25 attached to the movable part 20 for observing an image of the object S supported by the support part 15, a moving mechanism 30 for linearly moving the movable part 20 and a driving part 40 for driving the moving mechanism 30. The moving mechanism 30 is constituted of an external threaded member 31, supported rotatably on the movable part 20 and an internal threaded member 32 provided on the fixed part 10 and screwed with the external member 31, and the driving part 40 is provided on the movable part 20. The external threaded member 31 and an output shaft 42 of the driving part 40 are, preferably, provided coaxially. COPYRIGHT: (C)2008,JPO&INPIT
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