| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element to make a patterning of an organic EL layer using a photolithography method, having no defect and having a high safety and reliability. SOLUTION: The manufacturing method comprises a forming process of an organic electroluminescent layer including a luminous layer on a substrate on which at least a first electrode layer is formed, a forming process of a photoresist layer to form it on the organic electroluminescent layer, a patterning process of the photoresist layer to pattern exposure and develop the photoresist layer, a patterning process of the organic electroluminescent layer to remove the organic electroluminescent layer of the portion in which the photoresist layer is removed, an ozone water treatment process to contact the photoresist layer with the patterning made to ozone water, a removing process to exfoliate the remaining photoresist layer by a resist stripper, and a second electrode layer forming process to form a second electrode layer on the organic electroluminescent layer exposed after the removal process. COPYRIGHT: (C)2008,JPO&INPIT
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