| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for performing the moving control of a table or a gantry to increase precision in a table moving type or a gantry type moving machine and a coater using the same. SOLUTION: In recent years, as a product, a liquid crystal panel that is a typical one is gradually enlarged and a cost reduction is also strongly required, the glass plate of a material is gradually enlarged. Not only the table moving type but also gantry type coater have been developed in a coating process to the enlarged glass plate. As a method for preventing coating unevenness with regard to the table moving machine or the gantry moving device, when the table or the gantry is moved, the speeds or unevenness in deviation of the table or the gantry type are minimized using an acceleration feedback control system. COPYRIGHT: (C)2008,JPO&INPIT
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