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发明名称
Steuersystem und Verfahren für ein gesteuertes Objekt in einem zeitvarianten System mit Totzeit, beispielsweise eine Einkristall-Produktionsvorrichtung durch das Czochralski-Verfahren
摘要
申请公布号
DE112006002130(T5)
申请公布日期
2008.06.26
申请号
DE200611002130T
申请日期
2006.06.07
申请人
SUMCO TECHXIV CORPORATION
发明人
BANDOH, KENICHI;MORIMOTO, SHIGEO;OKUMURA, TAKUJI;NAGATA, TETSU;SHIMADA, MASARU;TOMIOKA, JUNSUKE;SHIRAISHI, YUTAKA;KODAMA, TAKESHI
分类号
C30B15/20;C30B29/06
主分类号
C30B15/20
代理机构
代理人
主权项
地址
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