发明名称 SLIT NOZZLE
摘要 PROBLEM TO BE SOLVED: To provide a slit nozzle capable of reducing idle time for bubble removal work and removing striped unevenness of a coating film caused by bubbles. SOLUTION: Bubbles (air) entrained in a coating solution are stagnated in the ceiling part of a first storage part 4 after getting off the coating solution during the time the coating solution flows from the first storage part 4 to a second storage part 5 and since the first storage part 4 is formed just like a range of two mountains, the air reaches the top part along the ceiling and is discharged out of a bubble discharge port 7 opened there. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008142648(A) 申请公布日期 2008.06.26
申请号 JP20060333930 申请日期 2006.12.12
申请人 TOKYO OHKA KOGYO CO LTD 发明人 TAKASE SHINJI;YAMAGUCHI KAZUNOBU;KUMAZAWA HIROTSUGU
分类号 B05C5/02;H01L21/027 主分类号 B05C5/02
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