| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus which can prevent a single crystal from falling during single crystal growth. SOLUTION: The single crystal pulling apparatus 1 is equipped with: a weight detection sensor 11a which is attached to a pulling mechanism 11 and detects the weight of a single crystal Ig being pulled; crystal holding rods 15a which are constituted of a plurality of rods provided at an interval in the outer periphery of a furnace main body 2, watch and wait at the outside of the furnace main body 2 when they are out of operation, and project into the furnace main body 2 while crossing mutually and put the single crystal Ig between them when they are in operation; and falling prevention units 15A each having a driving mechanism for pressing the crystal holding rod 15a so as to push out it. When the weight detection sensor 11a detects the change in the crystal weight not lower than a prescribed value, the driving mechanisms are operated, so that the crystal holding rods 15a project into the furnace main body 2 and prevent falling of the single crystal. COPYRIGHT: (C)2008,JPO&INPIT
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