SCINTILLATOR BASED X-RAY SENSITIVE INTEGRATED CIRCUIT ELEMENT WITH DEPLETED ELECTRON DRIFT REGION

摘要

It is described an integrated circuit design and a method to fabricate the same for a high-efficiency, low-noise, position sensitive X-ray detection in particular for medical applications. The device (350) is based on deep recesses (354) filled with an X-ray sensitive scintillator material. A shallow first electrode (360) is formed on the surface of the substrate (352) sidewalls separating two neighboring recesses (354). This sidewall electrode (360) in combination with particular frontside wafer electrode (363) structure results in a full depletion of the entire device (350) and a removal of signal charge towards the low capacitance readout electrode (363). The described integrated circuit element (350) ensures high and not depth dependent light collection efficiency.