| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprinting mold which reduces destruction of a mold pattern in an imprinting method, and its manufacturing method. <P>SOLUTION: In the imprinting mold, at least the corners of the recessed parts of the uneven patterns of the mold are formed into a round shape. When releasing the mold in imprinting, the stress concentration in a mold material can be relaxed. Accordingly, the destruction of the mold pattern can be reduced. The destruction of the mold pattern can be reduced even in pattern transfer of a high aspect ratio. <P>COPYRIGHT: (C)2008,JPO&INPIT |
