| 摘要 |
PROBLEM TO BE SOLVED: To directly convert a silicon raw material into spherical silicon single crystals; and at the same time, to drastically improve the yield of the spherical silicon single crystals. SOLUTION: High purity powdery silicon 22 is accommodated in recesses of a high purity ceramic, quartz glass or porous ceramic vessel each having a surface with a fine projection and recess structure and many recesses. Then, the powdery silicon 22 in each recess is melted in an atmosphere, obtained by adding a silane gas or a silicon halide gas into an inert gas or a high purity inert gas, to form liquid-repellent silicon 23 in the recess. Thereafter, the spherical silicon crystals are obtained by cooling the liquid-repellent silicon 23. COPYRIGHT: (C)2008,JPO&INPIT
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