发明名称 Inspection method, inspection apparatus and computer-readable storage medium storing program
摘要 The present invention includes a fritting circuit applying a voltage between a probe pair composed of probes in pairs in contact with a substrate to cause a fritting phenomenon to establish an electrical conduction between at least one of the probe pair and the substrate; and a switching circuit electrically connecting the probe pair and the fritting circuit and capable of freely switching between polarities of a voltage applied between the probe pair. Voltage is applied twice between the probe pair in contact with the substrate to thereby perform fritting twice. In the two times of fritting, the polarities of the voltage applied between the probe pair are changed. According to the present invention, electrical conduction between the probes and the substrate can be obtained more stably.
申请公布号 US2008150562(A1) 申请公布日期 2008.06.26
申请号 US20070003214 申请日期 2007.12.20
申请人 TOKYO ELECTRON LIMITED 发明人 KUMAGAI YASUNORI;TOH KA
分类号 G01R31/02 主分类号 G01R31/02
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