Process for Large-Scale Production of Cdte/Cds Thin Film Solar Cells, Without the Use of Cdci2

摘要

A process for large-scale production of CdTe/CdS thin film solar cell the films of the solar cells being deposited as a sequence on a transparent substrate, which comprises the steps of: depositing a film of a transparent conductive oxide (TCO) on the substrate; depositing a film of CdS on the TCO film; treating the CdTe film with Chlorine-containing inert gas; and depositing a back-contact film on the treated CdTe film. The Chlorine-containing inert gas is a Chlorofluorocarbon or a Hydrochlorofluorocarbon product and the treatment is carried out in a vacuum chamber at an operating temperature of 380-420° C. The Chlorine released as a result of the thermal dissociation of the product reacts with solid CdTe present on the cell surface to produce TeCl₂ and CdCl₂ vapors. Any residual CdCl₂ is removed from the cell surface by applying a vacuum to the vacuum chamber while keeping the temperature at the operating value.