METHOD OF FORMING OXIDE BASED NANO STRUCTURES

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an oxide-based nano-structured material by growing a nano-structured material using a nano-nucleus having the same composition as the desired oxide-based nano-structured material. SOLUTION: The method of forming the oxide-based nano-structured material includes steps of: coating the surface of a substrate with a solution including an organic precursor containing M (M is a transition metal or a semi metal) and an organic solvent dissolving the organic precursor; forming a nano-nucleus having a composition of MxOy (wherein, x is an integer of 1 to 3 and y is an integer of 1 to 6) on the substrate by heat treating the substrate coated with the mixed solution; forming a nano-structured material having a composition of MxOy (wherein, x is an integer of 1 to 3 and y is an integer of 1 to 6) by growing the nano-nucleus while supplying a reaction precursor containing M to the nano-nucleus; and heat treating the nano-structured material. COPYRIGHT: (C)2008,JPO&INPIT