发明名称 MICROACTUATOR
摘要 <p>A microactuator comprises a fixed section and a movable section having an end fixed to the fixed section. The movable section has a curved portion, and a linear portion arranged between the curved portion and the fixed end. The fixed section has a first electrode portion at a position corresponding to at least a part of the linear portion and at least a part of the curved portion, and the movable section has a second electrode portion at the linear portion and the curved portion. When a drive voltage of a predetermined level or higher is applied between the first and second electrode portions, at least a part of the linear portion and at least a part of the curved portion are pulled in to the fixed section side by an electrostatic force acting as a driving force between the first and second electrode portions. This microactuator operates with a low drive voltage.</p>
申请公布号 WO2008075612(A1) 申请公布日期 2008.06.26
申请号 WO2007JP74045 申请日期 2007.12.13
申请人 NISHIYAMA, MADOKA;NIKON CORPORATION;SUZUKI, JUNJI;KONISHI, HIROSHI 发明人 NISHIYAMA, MADOKA;SUZUKI, JUNJI;KONISHI, HIROSHI
分类号 H02N1/00;B81B3/00;G02B26/02 主分类号 H02N1/00
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