发明名称 METHODS AND APPARATUS FOR FABRICATING CONDUCTIVE FEATURES ON GLASS SUBSTRATES USED IN LIQUID CRYSTAL DISPLAYS
摘要 Methods and systems for defining metal features to be part of a liquid crystal display (LCD) is provided. The method is applied to a glass substrate, and the glass substrate has a blanket conductive metal layer (e.g., a barrier layer) defined on the glass substrate or a layer of the glass substrate. An inverse photoresist mask is applied over the blanket conductive metal layer. A plating meniscus is then formed over the inverse photoresist mask. The plating meniscus contains at least an electrolytic solution and a plating chemistry, where the plating meniscus forms metal features in regions over the blanket conductive metal layer not covered by the inverse photoresist mask.
申请公布号 KR20080058478(A) 申请公布日期 2008.06.25
申请号 KR20087011296 申请日期 2006.09.08
申请人 LAM RESEARCH CORPORATION 发明人 MARKS JEFFREY
分类号 H01L21/77;C25D5/02;C25D5/04;G02F1/1362 主分类号 H01L21/77
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