| 摘要 |
An apparatus for analyzing emission is provided to shorten an interval of time for analyzing a defect by analyzing the physical structure of an emission point from an inspection target. A stage(110) on which an inspection target(112) is placed is installed in a chamber(90). A SEM(scanning electron microscope) column acquires the image of the inspection target, installed in the chamber. An emission detector column(118) detects the light emission of the inspection target, installed in the chamber. The stage can rotate at a predetermined angle, having a rotation axis(A3) parallel with a stage surface.
|
