Device with ceramic thin plate member and metal thin plate member

摘要

A device includes a ceramic thin plate member (13) including a fired ceramic sheet; and a metal thin plate member (12) having an outer shape larger than that of the ceramic thin plate member (13). An outer circumferential portion of the ceramic thin plate member is joined to the metal thin plate member. The metal thin plate member (12) has through holes (12b) and a plurality of crease portions (12d). Each crease portion (12d) has a ridge portion whose crest continuously extends from a joint portion between the ceramic thin plate member (13) and the metal thin plate member (12) toward an outer circumferential portion of the metal thin plate member (12). Since thermal stress due to a difference in thermal expansion between the metal thin plate member (12) and the ceramic thin plate member (13) can be relaxed through expansion of the crease portions (12d), the ceramic thin plate member (13) does not deform.