| 摘要 |
A thermal isolation device for liquid supply piping is provided to increase a yield of semiconductor chips by continuously supplying a chemical substance in a state where a process apparatus does not stop. A thermal isolation device includes a chemical supply tank storing and supplying a chemical substance and a process tank receiving the chemical substance from the chemical supply tank. A drain pipe(10) is connected to the chemical supply tank at one end thereof to drain the chemical substance, and an inflow pipe(20) is connected to the process tank at one end thereof to supply the chemical substance. A thermal insulation pipe(30) is connected between the drain pipe and the inflow pipe to supply only the chemical substance.
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