LIQUID TARGET PRODUCING DEVICE BEING ABLE TO USE MULTIPLE CAPILLARY TUBE AND X-RAY AND EUV LIGHT SOURCE DEVICE WITH THE SAME

摘要

A liquid target supplying device capable of mounting a multiple capillary tube and an X-ray and EUV(Extreme UV) light source generation device with the same are provided to expand a range of used gas by forming a liquid target with various kinds of gases without replacement of a cooling solvent. A liquid target supplying device includes a capillary tube(110), a gas storage tank(120), a metal jacket(130), a cryocooler(140), and transfer devices. The capillary tube injects a liquid target in a jet type. The gas storage tank is connected to the capillary tube through a gas line(122) and stores a gas to be supplied to the capillary tube. The metal jacket is positioned on an outer circumferential surface of the capillary tube to mount a plurality of capillary tubes and liquefies the gas supplied through the gas line. The cryocooler is connected to the metal jacket through a thermal conductive wire(142) and cools the metal jacket. The transfer devices transfer the metal jacket to set initial positions of the capillary tubes.