| 摘要 |
A vertical cavity surface emitting laser device and a method for fabricating the same are provided to match precisely an oxidation aperture with a ring aperture by implementing the ring apertures in an initial fabrication. A vertical cavity surface emitting laser device includes lower and upper reflective layers, an activation layer(120), an electrode, a contact layer(150), a quarter waveform layer(160), and a dielectric layer(170). The lower and upper reflective layers, which are stacked on each other, form a resonance space therebetween. The activation layer, formed between the lower and upper reflective layers, generates laser beams. The electrode is formed on the upper reflective layer with a ring shape so as to form an aperture that emits beams penetrated through the upper reflective layer. The contact layer is formed on the upper reflective layer. The quarter waveform layer is formed on the contact layer so as to form a high transmittance area in the aperture of the electrode as a ring shape. The dielectric layer covers the contact layer and the quarter waveform layer other than the electrode.
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