发明名称 |
A METHOD OF MANUFACTURING A MEMS CAPACITOR MICROPHONE, SUCH A MEMS CAPACITOR MICROPHONE, A STACK OF FOILS COMPRISING SUCH A MEMS CAPACITOR MICROPHONE, AN ELECTRONIC DEVICE COMPRISING SUCH A MEMS CAPACITOR MICROPHONE AND USE OF THE ELECTRONIC DEVICE |
摘要 |
The invention relates to a method of manufacturing a MEMS capacitor microphone and further to such MEMS capacitor microphone. With the method a MEMS capacitor microphone can be manufactured by stacking pre-processed foils ( 10 ) having a conductive layer ( 11 a, 11 b) on at least one side. After stacking, the foils ( 10 ) are sealed, using pressure and heat. Finally the MEMS capacitor microphones are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil ( 10 ), and (D) removing both the conductive layer as well as foil ( 10 ), thus making holes in the foil ( 10 ). In combination with said stacking, it is possible to create cavities and membranes. This opens up the possibility of manufacturing MEMS capacitor microphone. |
申请公布号 |
EP1934134(A2) |
申请公布日期 |
2008.06.25 |
申请号 |
EP20060795771 |
申请日期 |
2006.08.24 |
申请人 |
NXP B.V. |
发明人 |
LANGEREIS, GEERT;WEEKAMP, JOHANNES WILHELMUS;GIESBERS, JACOBUS BERNARDUS |
分类号 |
B81C99/00 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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