发明名称 |
DISCRETIZED PROCESSING AND PROCESS SEQUENCE INTEGRATION OF SUBSTRATE REGIONS |
摘要 |
<p>The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.</p> |
申请公布号 |
EP1935003(A2) |
申请公布日期 |
2008.06.25 |
申请号 |
EP20060740662 |
申请日期 |
2006.04.07 |
申请人 |
INTERMOLECULAR, INC. |
发明人 |
CHIANG, TONY, P.;LAZOVSKY, DAVID, E.;BOUSSIE, THOMAS, R.;MCWAID, THOMAS, H. |
分类号 |
C23C16/52;A23B4/12;A23J3/34;C23C14/54;G01N33/20;G01R31/26;H01L21/66 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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