| 发明名称 |
SILSESQUIOXANE-TITANIA HYBRID POLYMERS |
| 摘要 |
The invention relates to silsesquioxane-titania hybrid polymers, wherein the titania domain size is less than about five nanometers. Such polymers are useful, for example, to form anti-reflection coatings in the fabrication of microelectronic devices. |
| 申请公布号 |
KR20080058503(A) |
申请公布日期 |
2008.06.25 |
| 申请号 |
KR20087012622 |
申请日期 |
2006.10.25 |
| 申请人 |
DOW GLOBAL TECHNOLOGIES INC. |
发明人 |
POPA PAUL J.;MILLS LYNNE K.;HOWARD KEVIN E. |
| 分类号 |
C08G77/48;C08G77/58;C08K3/20;G03F7/09 |
主分类号 |
C08G77/48 |
| 代理机构 |
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