| 摘要 |
<p>An apparatus for manufacturing a semiconductor is provided to maintain a temperature of a substrate by preventing a local temperature variation on the substrate. An apparatus of manufacturing a semiconductor includes a heater(120), a cooler(110), a transfer unit(101), and an auxiliary heater(130). The heater heats up a substrate. The cooler columns down the heated substrate. The transfer unit is provided between the heater and the cooler. The transfer unit transfers the heated substrate to the cooler. The auxiliary heater heats up the transfer unit, such that a temperature of the transfer unit is the same as that of the heated substrate. The auxiliary heater is arranged to be adjacent to the heater.</p> |
