| 摘要 |
An edge bead removing apparatus of a substrate is provided to remove edge beads formed at the edge side of a substrate effectively, thereby reducing the badness in the manufacturing process. A fixing member fixes a substrate(100). A body(101) is located at a side of the substrate and injects the medicine liquid to a side of the substrate. At least one brush(130) is installed at a side of the body opposite to the side of the substrate. A driving motor is connected with the brush and rotates the brush. A washing solution supply member(133) is formed at the side of the body and supplies the washing solution to the brush. An upper head member(110) is extended from the body toward the upper direction of the substrate and injects the medicine liquid to the upper edge portion of the substrate. A lower head member(120) is extended from the body toward the lower direction of the substrate and injects the medicine liquid to the lower edge portion of the substrate. |
