| 摘要 |
<p>A transfer apparatus is provided to multiply a command value by a correction coefficient or add a correction coefficient to a command value by measuring an interval between an electromagnet and a transfer body and by calculating a correction value of driving current applied to a coil based upon the measurement result. A transfer body(reticle stage,100) can transfer in at least one direction. An electromagnet(106a) includes a coil and drives the transfer body. An electromagnet control system feedback-controls the electromagnet based upon an inputted command value. A thrust correction unit calculates a correction coefficient related to the thrust error of the electromagnet and multiplies or adds the correction coefficient to the command value to correct the command value. A second can measure an interval between the electromagnet and the transfer body, and the thrust correction unit can calculate the correction coefficient based upon the output of the sensor.</p> |
