发明名称 Local collector implant structure for heterojunction bipolar transistors and method of forming the same
摘要 A bipolar transistor structure includes an intrinsic base layer formed over a collector layer, an emitter formed over the intrinsic base layer, and an extrinsic base layer formed over the intrinsic layer and adjacent the emitter. A ring shaped collector implant structure is formed within an upper portion of the collector layer, wherein the ring shaped collector implant structure is disposed so as to be aligned beneath a perimeter portion of the emitter.
申请公布号 US7390720(B2) 申请公布日期 2008.06.24
申请号 US20060538848 申请日期 2006.10.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 PAGETTE FRANCOIS
分类号 H01L21/331;H01L21/8222 主分类号 H01L21/331
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