发明名称 Magnetic head having a notched pole piece structure and method of making the same
摘要 A magnetic head having an improved fringing field and overwrite capability, and a method of making the same, are described. The method includes the acts of frame plating a pedestal over a first pole piece; depositing an insulator over the first pole piece and plated pedestal; chemically mechanically polishing (CMP) the top of the insulator to expose a top of the plated pedestal; depositing a gap layer over the top of the insulator and plated pedestal; depositing a seed layer over the gap layer; forming a second pole piece over the seed layer; ion milling, using the second pole piece as a mask, such that end portions of the seed layer are removed and a central portion remains; reactive ion milling, using the central portion of the seed layer as a mask, such that end portions of the gap layer are removed and a central portion of the gap layer having a width that is greater than a width of the second pole piece is formed; and ion milling the plated pedestal, using the central portion of the gap layer as a mask, to form a central notched structure having angled side walls of 25 degrees±24 degrees relative to normal.
申请公布号 US7391591(B2) 申请公布日期 2008.06.24
申请号 US20050202712 申请日期 2005.08.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HSIAO WEN-CHEIN DAVID;LO JYH-SHUEY JERRY
分类号 G11B5/147;G11B5/31;G11B5/39 主分类号 G11B5/147
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