| 摘要 |
A substrate support and a substrate coating apparatus are provided to prevent a substrate from being damaged due to a lift pin by using a protective member mounted on a hole. A substrate support member(102) supports a substrate. Plural lift pins(110) are mounted, such that the lift pins are moved in a vertical direction through the substrate support member. A driving unit(120) is connected to the lift pin and moves the lift pin in the vertical direction, such that the substrate is loaded and unloaded on and from the substrate support member. Plural protective members(130) are mounted on holes of the substrate support member, such that the substrate support member is protected from the vertical directional movement of the lift pin. The lift pin penetrates the holes on the substrate support member. An upper inner diameter of the hole is smaller than an inner diaphragm of a portion, on which the protective member is mounted.
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