FILM FORMING EQUIPMENT AND FILM FORMING METHOD,申请号KR20077004433-传众专利搜索

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发明名称	FILM FORMING EQUIPMENT AND FILM FORMING METHOD
摘要
申请公布号	KR100841116(B1)	申请公布日期	2008.06.24
申请号	KR20077004433	申请日期	2007.02.23
申请人		发明人
分类号	H01L21/285;H01L21/3205	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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