| 摘要 |
A probe card for testing a semiconductor device is provided to facilitate replacement of deformed probes and enable stable connection between a semiconductor device as an object to be tested and a circuit board, while achieving fine pitch between probes. A probe card(100) for testing a semiconductor device comprises a plurality of probes(110), a plurality of fixed members(120), a base member(130), a main printed circuit board(140), and a connection unit. Each probe comprises a contact tip on one side and a terminal tip on the opposite side. The fixed members are configured to allow the probe to make the contact tip and terminal tip projected. The base member is where the fixed members are secured in a longitudinal direction, the contact tip is arranged to be connected to a contact pad(2) of the semiconductor device, and the terminal tip is located on a vertically open connection space. The main printed circuit board is where the base member is fixed. The connection unit makes the contact tip of the probe and the main circuit board connected with each other.
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