发明名称 DEVICE FOR PROCESSING MOLDED SEMICONDUCTOR, AND METHOD FOR PROCESSING MOLDED SEMICONDUCTOR
摘要 An apparatus for processing a molding material of a semiconductor device is provided to remove static electricity and dust remaining on a molding material by injecting ions and air to the molding material. A molded semiconductor device is temporarily placed on a placement member(140). A transfer member(130) reciprocates while the placement member is supported. An injection part(150) injects air to the upper surface of the molding material to remove dust and static electricity. A reciprocation transfer part can be installed to slidingly reciprocate the transfer member horizontally.
申请公布号 KR20080056870(A) 申请公布日期 2008.06.24
申请号 KR20060129982 申请日期 2006.12.19
申请人 SECRON CO., LTD. 发明人 CHOI, IL RAK
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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